Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887576 | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof | Tatsuhiro Sato, Nobumasa Yoshida, Akira Fujinoki, Tomoyuki Shirai | 2005-05-03 |
| 6869898 | Quartz glass jig for processing apparatus using plasma | Naoto Watanabe, Tohru Segawa, Hiroyuki Kimura | 2005-03-22 |