Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887576 | Quartz glass body having improved resistance against plasma corrosion, and method for production thereof | Tatsuhiro Sato, Nobumasa Yoshida, Akira Fujinoki, Kyoichi Inaki | 2005-05-03 |