Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6878609 | Silicon wafer break pattern, silicon substrate, and method of generating silicon wafer break pattern | Akihisa Wanibe, Noriaki Okazawa, Yoshinao Miyata, Toshinao Shinbo, Tetsuya Akasu | 2005-04-12 |