Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951221 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2005-10-04 |
| 6901938 | Substrate cleaning apparatus | Masanobu Sato, Sadao Hirae, Kenya Morinishi | 2005-06-07 |