Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951221 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Sadao Hirae, Shuichi Yasuda +2 more | 2005-10-04 |
| 6942737 | Substrate cleaning apparatus and method | — | 2005-09-13 |
| 6924596 | Light emitting apparatus provided with fluorescent substance and semiconductor light emitting device, and method of manufacturing the same | Tomoya Tsukioka, Masafumi Kuramoto | 2005-08-02 |
| 6901938 | Substrate cleaning apparatus | Sadao Hirae, Shuichi Yasuda, Kenya Morinishi | 2005-06-07 |