Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6879393 | Defect inspection apparatus for phase shift mask | Yasuhiro Koizumi, Shiaki Murai, Katsuhide Tsuchiya | 2005-04-12 |
SN
Shigeru Noguchi
Overall (2005): #102,109 of 245,428Top 45%
1
Patents 2005