Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6879393 | Defect inspection apparatus for phase shift mask | Shiaki Murai, Shigeru Noguchi, Katsuhide Tsuchiya | 2005-04-12 |
| 6863018 | Ion plating device and ion plating method | Kouichi Nose, Isao Tokomoto | 2005-03-08 |
| 6841399 | Method of manufacturing mask and method of manufacturing semiconductor integrated circuit device | Norio Hasegawa, Katsuya Hayano, Shinji Kubo, Hironobu Takaya, Morihisa Hoga | 2005-01-11 |