Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6959823 | Wafer guides for processing semiconductor substrates | Pil-Kwon Jun, Sang-Oh Park, Hun-Jung Yi | 2005-11-01 |
| 6939410 | Apparatus and method for collecting impurities on a semiconductor wafer | Byung-Woo Son, Jong Cheol JEONG | 2005-09-06 |
| 6905570 | Apparatus for manufacturing integrated circuit device | Kwang-Shin Lim, Pil-Kwon Jun, Hun-Jung Yi, Sang-Oh Park | 2005-06-14 |
| 6883248 | Apparatus for drying a substrate using an isopropyl alcohol vapor | Jae-Jun Ryu, Hun-Jung Yi, Pil-Kwon Jun | 2005-04-26 |