Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6959823 | Wafer guides for processing semiconductor substrates | Pil-Kwon Jun, Sang-Oh Park, Yong-Kyun Ko | 2005-11-01 |
| 6905570 | Apparatus for manufacturing integrated circuit device | Kwang-Shin Lim, Pil-Kwon Jun, Sang-Oh Park, Yong-Kyun Ko | 2005-06-14 |
| 6883248 | Apparatus for drying a substrate using an isopropyl alcohol vapor | Yong-Kyun Ko, Jae-Jun Ryu, Pil-Kwon Jun | 2005-04-26 |