Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919149 | Wave guided alternating phase shift mask and fabrication method thereof | Seong-hyuck Kim, In-Kyun Shin | 2005-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919149 | Wave guided alternating phase shift mask and fabrication method thereof | Seong-hyuck Kim, In-Kyun Shin | 2005-07-19 |