Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919149 | Wave guided alternating phase shift mask and fabrication method thereof | Seong-hyuck Kim, Tae-Moon Jeong | 2005-07-19 |
| 6866968 | Photomask for off-axis illumination and method of fabricating the same | Jung Min Sohn, Hee-sun Yoon, Seong-woon Choi | 2005-03-15 |