Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975010 | MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same | Eun Sung Lee, Hyun Ok Kim | 2005-12-13 |
| 6952965 | Vertical MEMS gyroscope by horizontal driving | Seok Jin Kang, Seok-whan Chung, Kyu-dong Jung, Seog-soo Hong | 2005-10-11 |