Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975010 | MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same | Eun Sung Lee, Moon-chul Lee | 2005-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975010 | MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same | Eun Sung Lee, Moon-chul Lee | 2005-12-13 |