Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960265 | Apparatus and method for collecting metallic impurity on a semiconductor wafer | Yong-Woo Heo, June-Ing Gill, Mi Kyoung Lee | 2005-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960265 | Apparatus and method for collecting metallic impurity on a semiconductor wafer | Yong-Woo Heo, June-Ing Gill, Mi Kyoung Lee | 2005-11-01 |