Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970532 | Method and apparatus for measuring thin film, and thin film deposition system | Seiichi Hayashi, Jimpei Harada, Tetsuo Kikuchi, Katsuhiko Inaba | 2005-11-29 |
| 6937694 | Pole measuring method | Ryouichi Yokoyama, Kamihisa Endo, Ryuji Matsuo | 2005-08-30 |
| 6920200 | Density-nonuniform multilayer film analyzing method, and apparatus and system thereof | Yoshiyasu Ito | 2005-07-19 |
| 6873681 | Method of estimating preferred orientation of polycrystalline material | Hideo Toraya | 2005-03-29 |