Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970532 | Method and apparatus for measuring thin film, and thin film deposition system | Seiichi Hayashi, Tetsuo Kikuchi, Kazuhiko Omote, Katsuhiko Inaba | 2005-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970532 | Method and apparatus for measuring thin film, and thin film deposition system | Seiichi Hayashi, Tetsuo Kikuchi, Kazuhiko Omote, Katsuhiko Inaba | 2005-11-29 |