Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6849542 | Method for manufacturing a semiconductor device that includes planarizing with a grindstone that contains fixed abrasives | Soichi Katagiri, Ui Yamaguchi, Seiichi Kondo, Masahiro Kaise, Minoru Honda | 2005-02-01 |