Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908860 | Method for manufacturing semiconductor device and apparatus for manufacturing thereof | Souichi Katagiri | 2005-06-21 |
| 6849542 | Method for manufacturing a semiconductor device that includes planarizing with a grindstone that contains fixed abrasives | Soichi Katagiri, Seiichi Kondo, Kan Yasui, Masahiro Kaise, Minoru Honda | 2005-02-01 |