Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953733 | Method of manufacturing alignment mark and aligning method using the same | Yasuhiro Yamamoto | 2005-10-11 |
| 6894782 | Method of measuring defocusing and method of obtaining correct focusing | Daigo Hoshino | 2005-05-17 |