Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980278 | Self-cleaning method for semiconductor exposure apparatus | Ryoichi Aoyama, Toshio Onodera, Yasuhiro Yamamoto | 2005-12-27 |
| 6894782 | Method of measuring defocusing and method of obtaining correct focusing | Takahiro Yamauchi | 2005-05-17 |
| 6872494 | Photomask and method of fabricating semiconductor device by use of same | — | 2005-03-29 |