Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967174 | Wafer chuck for use in edge bevel removal of copper from silicon wafers | Steven T. Mayer, Steve Taatjes, Jim Schall, Jingbin Feng | 2005-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967174 | Wafer chuck for use in edge bevel removal of copper from silicon wafers | Steven T. Mayer, Steve Taatjes, Jim Schall, Jingbin Feng | 2005-11-22 |