Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963408 | Method and apparatus for point diffraction interferometry | Mikihiko Ishii, Hisashi Shiozawa, Jun Kawakami, Yasushi Fukutomi | 2005-11-08 |
| 6894763 | Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same | Seiro Murakami, Takaharu Miura, Akikazu Tanimoto, Hideo Mizutani | 2005-05-17 |