Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888621 | Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method | Yasuo Araki, Noriaki Tokuda, Masahiko Yasuda, Hiroaki Narushima | 2005-05-03 |