Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888621 | Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method | Yasuo Araki, Noriaki Tokuda, Shinji Mizutani, Hiroaki Narushima | 2005-05-03 |
| 6876946 | Alignment method and apparatus therefor | Osamu Furukawa, Masaharu Kawakubo, Hiroki Tateno, Nobutaka Magome | 2005-04-05 |