Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950178 | Method and system for monitoring plasma using optical emission spectroscopy | Kevin Hamer | 2005-09-27 |
| 6936547 | Gas delivery system for deposition processes, and methods of using same | Weimin Li, Li Li, Ross S. Dando, Kevin Hamer, Allen Mardian | 2005-08-30 |
| 6908807 | Methods of forming semiconductor constructions | — | 2005-06-21 |
| 6866900 | Deposition and chamber treatment methods | Weimin Li | 2005-03-15 |