Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950178 | Method and system for monitoring plasma using optical emission spectroscopy | Neal R. Rueger | 2005-09-27 |
| 6936547 | Gas delivery system for deposition processes, and methods of using same | Weimin Li, Neal R. Rueger, Li Li, Ross S. Dando, Allen Mardian | 2005-08-30 |
| 6849133 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Philip Campbell, Craig M. Carpenter, Ross S. Dando | 2005-02-01 |