Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899607 | Polishing systems for use with semiconductor substrates including differential pressure application apparatus | — | 2005-05-31 |
| 6887138 | Chemical mechanical polish (CMP) conditioning-disk holder | Brian E. Bottema, Larry J. Bustos, Martin Cain | 2005-05-03 |
| 6881134 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane | — | 2005-04-19 |
| 6872131 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane | — | 2005-03-29 |
| 6869345 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane | — | 2005-03-22 |
| 6863771 | Differential pressure application apparatus for use in polishing layers of semiconductor device structures and methods | — | 2005-03-08 |
| 6852017 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane | — | 2005-02-08 |