Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905392 | Polishing system having a carrier head with substrate presence sensing | Keven A. Cline, Morris S. Poteet | 2005-06-14 |
| 6887138 | Chemical mechanical polish (CMP) conditioning-disk holder | Larry J. Bustos, Martin Cain, Nathan R. Brown | 2005-05-03 |