Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979528 | Method and apparatus for uniformly baking substrates such as photomasks | — | 2005-12-27 |
| 6908511 | Apparatus for uniformly baking substrates such as photomasks | — | 2005-06-21 |
| 6908715 | Multi-layer, attenuated phase-shifting mask | — | 2005-06-21 |
| 6866049 | Device addressing gas contamination in a wet process | — | 2005-03-15 |
| 6860777 | Radiation shielding for field emitters | Terry N. Williams | 2005-03-01 |
| 6838338 | Integrated capacitor bottom electrode for use with conformal dielectric | Gurtej S. Sandhu | 2005-01-04 |