Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6885491 | Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system | Martin Ross-Messemer, Alexander Menck, Frank Holler, Kurt Franke, Günter Martin +1 more | 2005-04-26 |
| 6853115 | Acoustic surface wave component | Siegfried Menzel, Hagen Schmidt | 2005-02-08 |