Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6885491 | Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system | Alexander Menck, Frank Holler, Kurt Franke, Günter Martin, Hagen Schmidt +1 more | 2005-04-26 |