Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958005 | Polishing pad conditioning system | — | 2005-10-25 |
| 6955588 | Method of and platen for controlling removal rate characteristics in chemical mechanical planarization | Robert Luke Anderson | 2005-10-18 |
| 6935938 | Multiple-conditioning member device for chemical mechanical planarization conditioning | Yehiel Gotkis | 2005-08-30 |
| 6899594 | Relative lateral motion in linear CMP | Dae J. Lim, Peter Norton | 2005-05-31 |