Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841483 | Unique process chemistry for etching organic low-k materials | Helen Zhu, James R. Bowers, Ian J. Morey, Wayne Babie | 2005-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841483 | Unique process chemistry for etching organic low-k materials | Helen Zhu, James R. Bowers, Ian J. Morey, Wayne Babie | 2005-01-11 |