Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949450 | Method for integrated in-situ cleaning and subsequent atomic layer deposition within a single processing chamber | Tony P. Chiang | 2005-09-27 |
| 6878402 | Method and apparatus for improved temperature control in atomic layer deposition | Tony P. Chiang | 2005-04-12 |