Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939403 | Spatially-arranged chemical processing station | Chiu H. Ting, Jonathan Weiguo Zhang, Arthur Kolics | 2005-09-06 |
| 6935638 | Universal substrate holder for treating objects in fluids | Jonathan Weiguo Zhang | 2005-08-30 |
| 6913651 | Apparatus and method for electroless deposition of materials on semiconductor substrates | Jonathan Weiguo Zhang, Artur Kolics | 2005-07-05 |
| 6911067 | Solution composition and method for electroless deposition of coatings free of alkali metals | Artur Kolics, Nicolai Petrov, Chiu H. Ting | 2005-06-28 |
| 6908512 | Temperature-controlled substrate holder for processing in fluids | Jonathan Weiguo Zhang, Artur Kolics | 2005-06-21 |
| 6902605 | Activation-free electroless solution for deposition of cobalt and method for deposition of cobalt capping/passivation layer on copper | Artur Kolics, Nicolai Petrov, Chiu H. Ting | 2005-06-07 |
| 6881437 | Methods and system for processing a microelectronic topography | Weiguo Zhang | 2005-04-19 |
| 6860944 | Microelectronic fabrication system components and method for processing a wafer using such components | Welguo Zhang | 2005-03-01 |
| 6846519 | Method and apparatus for electroless deposition with temperature-controlled chuck | Jonathan Welgun Zhang, Artur Kolics | 2005-01-25 |