Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913651 | Apparatus and method for electroless deposition of materials on semiconductor substrates | Igor Ivanov, Jonathan Weiguo Zhang | 2005-07-05 |
| 6911067 | Solution composition and method for electroless deposition of coatings free of alkali metals | Nicolai Petrov, Chiu H. Ting, Igor Ivanov | 2005-06-28 |
| 6908512 | Temperature-controlled substrate holder for processing in fluids | Igor Ivanov, Jonathan Weiguo Zhang | 2005-06-21 |
| 6902605 | Activation-free electroless solution for deposition of cobalt and method for deposition of cobalt capping/passivation layer on copper | Nicolai Petrov, Chiu H. Ting, Igor Ivanov | 2005-06-07 |
| 6875691 | Temperature control sequence of electroless plating baths | Nanhai Li, Nicolai Petrov | 2005-04-05 |
| 6846519 | Method and apparatus for electroless deposition with temperature-controlled chuck | Igor Ivanov, Jonathan Welgun Zhang | 2005-01-25 |