Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6944572 | Apparatus for predicting life of rotary machine and equipment using the same | Tsunetoshi Arikado, Shuichi Samata, Takashi Nakao, Yuuichi Mikata | 2005-09-13 |
| 6937963 | Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff | Ken Ishii, Takashi Nakao, Shuichi Samata | 2005-08-30 |
| 6930359 | Semiconductor device and method of manufacturing the same | — | 2005-08-16 |
| 6909993 | Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system | Takashi Nakao, Shuichi Samata, Hiroshi Akahori, Ken Ishii | 2005-06-21 |
| 6898551 | System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus | Shuichi Samata, Akihito Yamamoto, Takashi Nakao, Takeo Furuhata | 2005-05-24 |
| 6885972 | Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system | Shuichi Samata, Takeo Furuhata, Takashi Nakao, Ken Ishii | 2005-04-26 |
| 6885950 | Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing | Kunihiro Mitsutake | 2005-04-26 |
| 6865513 | Method for predicting life of rotary machine and determining repair timing of rotary machine | Tsunetoshi Arikado, Shuichi Samata, Takashi Nakao, Yuuichi Mikata | 2005-03-08 |