Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946304 | Apparatus for and method of manufacturing a semiconductor device, and cleaning method for use in the apparatus for manufacturing a semiconductor device | Takashi Shimizu | 2005-09-20 |
| 6898551 | System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus | Shuichi Samata, Yukihiro Ushiku, Takashi Nakao, Takeo Furuhata | 2005-05-24 |
| 6841850 | Semiconductor device having silicon nitride film and silicon oxide film, and method of fabricating the same | Susumu Hiyama, Hiroshi Akahori, Shigehiko Saida | 2005-01-11 |