Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967719 | Method for inspecting exposure apparatus, exposure method for correcting focal point, and method for manufacturing semiconductor device | Takashi Sato, Shoji Mimotogi, Soichi Inoue | 2005-11-22 |
| 6963819 | Micropattern measuring method, micropattern measuring apparatus, and computer-readable recording medium on which a micropattern measuring program is recorded | Yumiko Miyano | 2005-11-08 |
| 6839470 | Pattern evaluation method, pattern evaluation system and computer readable recorded medium | — | 2005-01-04 |