Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977219 | Solvent vapor-assisted plasticization of photoresist films to achieve critical dimension reduction during temperature reflow | Rex Frost | 2005-12-20 |
| 6968532 | Multiple exposure technique to pattern tight contact geometries | Rex Frost, Phi L. Nguyen | 2005-11-22 |
| 6927082 | Method of evaluating the quality of a contact plug fill | Oleg Golonzka, Timothy F. Crimmins | 2005-08-09 |