Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977219 | Solvent vapor-assisted plasticization of photoresist films to achieve critical dimension reduction during temperature reflow | Swaminathan Sivakumar | 2005-12-20 |
| 6968532 | Multiple exposure technique to pattern tight contact geometries | Swaminathan Sivakumar, Phi L. Nguyen | 2005-11-22 |