Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909193 | High pH slurry for chemical mechanical polishing of copper | Anne Miller, A. Feller | 2005-06-21 |
| 6881674 | Abrasives for chemical mechanical polishing | A. Feller | 2005-04-19 |