Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939805 | Method of etching a layer in a trench and method of fabricating a trench capacitor | Jorn Lutzen, Barbara Schmidt, Martin Schrems, Daniel Kohler | 2005-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939805 | Method of etching a layer in a trench and method of fabricating a trench capacitor | Jorn Lutzen, Barbara Schmidt, Martin Schrems, Daniel Kohler | 2005-09-06 |