Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960541 | Process for fabrication of a semiconductor component having a tungsten oxide layer | Dirk Drescher, Helmut Tews, Helmut Wurzer | 2005-11-01 |
| 6939805 | Method of etching a layer in a trench and method of fabricating a trench capacitor | Jorn Lutzen, Barbara Schmidt, Stefan Rongen, Daniel Kohler | 2005-09-06 |