Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6944578 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Robert K. Leidy, Keith J. Machia +2 more | 2005-09-13 |
| 6917901 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Robert K. Leidy, Keith J. Machia +2 more | 2005-07-12 |