Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869860 | Filling high aspect ratio isolation structures with polysilazane based material | Michael P. Belyansky, Rama Divakaruni, Laertis Economikos, Rajarao Jammy, Padraic Shafer | 2005-03-22 |