Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975009 | Dual-wafer tunneling gyroscope and an assembly for making same | David T. Chang | 2005-12-13 |
| 6951768 | Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same | David T. Chang | 2005-10-04 |
| 6933164 | Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials | — | 2005-08-23 |
| 6922118 | Micro electrical mechanical system (MEMS) tuning using focused ion beams | Richard J. Joyce | 2005-07-26 |
| 6841838 | Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom | David T. Chang | 2005-01-11 |