Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975009 | Dual-wafer tunneling gyroscope and an assembly for making same | Randall L. Kubena | 2005-12-13 |
| 6951768 | Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same | Randall L. Kubena | 2005-10-04 |
| 6841838 | Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom | Randall L. Kubena | 2005-01-11 |