Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927002 | Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method | Takashi Hattori, Hidetoshi Satoh, Toshihiko Tanaka, Hiroshi Shiraishi | 2005-08-09 |