Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927002 | Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method | Takashi Hattori, Yasuko Gotoh, Hidetoshi Satoh, Toshihiko Tanaka | 2005-08-09 |
| 6855483 | Method for pattern formation and process for preparing semiconductor device | Takashi Hattori, Yuko Tsuchiya | 2005-02-15 |